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We demonstrate integrating a high quality factor lithium niobate microdiskresonator with a free-standing membrane waveguide. Our technique is based onfemtosecond laser direct writing which produces the pre-structure, followed byfocused ion beam milling which reduces the surface roughness of sidewall of thefabricated structure to nanometer scale. Efficient light coupling between theintegrated waveguide and microdisk was achieved, and the quality factor of themicroresonator was measured as high as 1.67*10^5.

Monolithic integration of a high-quality factor lithium niobate  microresonator with a free-standing membrane waveguide using femtosecond  laser assisted ion beam writing (FLAIBW)