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We experimentally demonstrate the use of subwavelength optical nanoantennaeto assist the gentle ablation of nanostructures directly using ultralow fluencefrom a Ti: sapphire oscillator through the excitation of surface plasmon waves.We show that this ablation mechanism is the same for metal and dielectric. Theanalytical solutions of ablation threshold are in excellent agreement with theexperiment estimations. Surface plasmon assisted locally enhanced ablation atnanoscale provides a method for nanomachining, manipulation and modificationthe nanostructures without collateral thermal damage to the materials. It isalso shown that this ablation can deposit low-density high quality thin nanofilm.

Surface Plasmon Assisted Gentle Ablation of Nanostructures by Femtosecond Oscillator