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We report the fabrication of few hundred microns long, hundreds of nanometerswide and 30 nm thick meanders made from YBa2CU3O7. Thin films protected by a 8nm-thick Ce02 cap layer have been patterned by high energy (a few tens of keV)oxygen ion irradiation through photoresist masks. DC and RF characterizationsoutline good superconducting properties of nano-meanders that could be used asSuperconducting Single Photon Detectors (SSPD). By mean of a resonant method,their inductance, which mainly sets the maximum speed of these devices, hasbeen measured on a wide range of temperature. It compares favorably withexpected values calculated from the geometry of the meanders and the knownLondon penetration depth in YBa2CU3O7.

Ion irradiated YBa2Cu3O7 nano-meanders for superconducting single photon detectors