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This paper is devoted to the unidimensional analysis of a 2-ports siliconresonator vibrating in thickness--extensional mode. Both excitation anddetection ports are capacitive transducers used to control the system oflongitudinal elastic waves established along the thickness of a layeredstructure. The analysis consists of integrating the capacitive transduction oflongitudinal elastic waves within a specific implementation of the generalscheme of impedance methods largely used as standard tools for the modelling ofRF-MEMS.

One-dimensional Modelling of Electrostatic Generation and Detection of Bulk Acoustic Waves in layered structures