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Renewed interest has been witnessed in utilizing the piezoelectric responseof $PbZr_{0.52}Ti_{0.48}O_{3}$ (PZT) films on glass substrates for applicationssuch as data storage and adaptive optics. Accordingly, new methodologies arebeing explored to grow well-oriented PZT thin films to harvest a largepiezoelectric response. However, thin film piezoelectric response issignificantly reduced compared to intrinsic response due to substrate inducedclamping, even when films are well-oriented. Here, a novel method is presentedto grow preferentially (100)-oriented PZT films on glass substrates byutilizing crystalline nanosheets as seed layers. Furthermore, increasing therepetition frequency up to 20 Hz during pulsed laser deposition helps to tunethe film microstructure to hierarchically ordered columns that leads to reducedclamping and enhanced piezoelectric response evidenced by transmission electronmicroscopy and analytical calculations. A large piezoelectric response of 280pm/V is observed in optimally tuned structure which almost triples the highestreported piezoelectric response on glass. To confirm that the clampingcompromises the piezoelectric response, denser films are deposited using alower repetition frequency and a $BiFeO_{3}$ buffer layer resulting insignificantly reduced piezoelectric responses. This paper demonstrates a novelmethod for PZT integration on glass substrates without compromising the largepiezoelectric response.

Tuning of large piezoelectric response in nanosheet-buffered lead zirconate titanate films on glass substrates