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We report on the synthesis of perovskite SrIrO3 thin films using sputteringtechnique. Single phase (110) oriented SrIrO$_3$ thin films were epitaxiallygrown on SrTiO3 (001) substrate. Using off-axis XRD $\theta-2\theta$ scans, wedemonstrate that these films exhibit (110) out-of-plane orientation with (001)and (1-10) lying in-plane. The sputtering grown thin films have a smooth,homogeneous surface, and excellent coherent interface with the substrate.

Synthesis of Perovskite SrIrO3 Thin Films by Sputtering Technique