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Two-dimensional electron systems found at the interface of SrTiO3-based oxideheterostructures often display anisotropic electric transport whose origin iscurrently under debate. To characterize transport along specificcrystallographic directions, we developed a hard-mask patterning routine basedon an amorphous CeO2 template layer. The technique allows preparingwell-defined microbridges by conventional ultraviolet photolithography which,in comparison to standard techniques such as ion- or wet-chemical etching, doesnot induce any degradation of interfacial conductance. The patterning scheme isdescribed in details and the successful production of microbridges based onamorphous Al2O3-SrTiO3 heterostructures is demonstrated. Significantanisotropic transport is observed for T < 30 K which is mainly related toimpurity/defect scattering of charge carriers in these heterostructures.

Patterning of two-dimensional electron systems in SrTiO3 based heterostructures using a CeO2 template