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Recently, liquid-phase crystallization of thin silicon films has emerged as apromising candidate for thin-film photovoltaics. On 10 \mu m thin absorbers,wafer-equivalent morphologies and open-circuit voltages were reached, leadingto a record efficiency of 12.1%. However, short-circuit current densities arestill limited, mainly due to optical losses at the glass-silicon interface.While nano-structures at this interface have been shown to efficiently reducereflection, up to now these textures caused an increase in recombination.Therefore, optical gains were mitigated due to electronic losses. Here, theSMooth Anti-Reflective Three-dimensional (SMART) texture is introduced in orderto overcome this trade-off. By smoothing nanoimprinted SiOx nano-pillar arrayswith spin-coated TiOx layers, light-trapping properties of laser-crystallizedsilicon solar cells could significantly be improved as successfully shown inthree-dimensional simulations and in experiment. At the same time, the smoothsurface morphology of SMART textures allows preserving electronic materialquality equivalent to that of planar reference samples and reaching Voc valuesabove 640 mV in 8 \mu m thin liquid-phase crystallized silicon solar cells.Furthermore, the short-circuit current density jsc could be increased from 21.0mA cm-2 for planar reference cells with already optimized anti-reflectiveinterlayer stacks to 23.3 mA cm-2 on SMART textures, corresponding to arelative increase of 11%.

Smooth anti-reflective three-dimensional textures for liquid-phase crystallized silicon thin-film solar cells on glass