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This paper reports on the growth and characterization of hexagonal boronnitride (hBN) and its use for solid-state thermal neutron detection. The hBNepilayers were grown by metalorganic chemical vapor deposition on sapphiresubstrates at a temperature of 1350 C. X-ray diffraction peak from the (002)hBN plane at a 2theta angle of 26.7 deg exhibited the c-lattice constant of6.66 {\AA} for these films. A strong peak corresponding to the high frequencyRaman active mode of hBN was found for the films at 1370.5/cm. hBN-basedsolid-state neutron detectors were fabricated and tested with ametal-semiconductor-metal configuration with an electrode spacing of 1 mm andhBN thickness of 2.5 micron. Fabricated detectors showed strong response todeep UV light as well. An intrinsic thermal neutron detection efficiency of0.86% was measured, which is close to the theoretically expected efficiency of0.87%. These results demonstrate that epitaxial hBN films are promising forthermal neutron detection applications.

Metalorganic chemical vapor deposition of hexagonal boron nitride on (001) sapphire substrates for thermal neutron detector applications