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Nanoindentation is an effective way of finding mechanical properties atnanoscale. They are especially useful for thin films where elimination of thesubstrate effect is required. The mechanism is based upon depth sensingindentation based on Oliver and Pharr modeling. Nanoindentation was used toevaluate the nanomechanical and fractographic properties of hard coatingsdeposited by magnetron sputtering. Radial and lateral cracks accompanied bydelamination of the coatings were observed during the indentation tests. Anovel phenomenon of stress induced crystallization was observed in case of theCNx films which resulted in crack deflection. Indentations at micro scale usingVickers Indenter were also done and the cracking phenomena were analyzed.

Indentation of Coatings at micro/nano scale: Crack formation and deflection