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Confocal x-ray fluorescence microscopy (CXRF) allows direct detection ofx-ray fluorescence from a micron-scale 3D volume of an extended, unthinnedsample. We have previously demonstrated the use of a novel collection optic,fabricated from silicon, that improves the spatial resolution of this approachby an order of magnitude over CXRF using polycapillaries. The optic, called acollimating channel array (CCA), consists of micron-scale,lithographically-fabricated arrays of collimating channels, all directedtowards a single source position. Due to the limited absorbing power ofsilicon, the useful energy range of these optics was limited to fluorescenceemission below about 10 keV. Here, we report fabrication of CCAs from germaniumsubstrates, and demonstrate their practical use for CXRF up to 20 keV.Specifically we demonstrate a nearly energy-independent critical spatialresolution $d_R$ of 2.1$\pm$0.17 \um from 2-20 keV, as well as excellentbackground reduction compared to silicon-based CCAs throughout this energyrange. Design details of the optic and background-reduction holder aredescribed. Two versions of the optic are now available upon request at thebeamline 20ID-B, Advanced Photon Source (APS) - Argonne National Laboratory.

Germanium Collimating micro-Channel Arrays For High Resolution, High Energy Confocal X-ray Fluorescence Microscopy