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We present an adaptive lens which tunes its focal length with a glassmembrane that is deformed by an integrated piezo bending actuator. A particularchallenge in the fabrication of this type of actuator is the need to contactthe electrodes on both sides of the piezo element, i.e. also on the glasssurface. Therefore, we show a novel contacting method where the top electrodeon the piezo is segmented and the backside electrode is left at a floatingpotential. With this setup we achieve tuning capabilities of more than 13 dptand response times in the range of less than 4 ms at a usable aperture of 4.5mm.

Single-Sided Contacting of Out-of-Plane Polarized Piezo Films for Fluid Membrane Lenses