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The self-excitation of plasma series resonance (PSR) oscillations is aprominent feature in the current of low pressure capacitive radio frequency(RF) discharges. This resonance leads to high frequency oscillations of thecharge in the sheaths and enhances electron heating. Up to now, the phenomenonhas only been observed in asymmetric discharges. There, the nonlinearity in thevoltage balance, which is necessary for the self-excitation of resonanceoscillations with frequencies above the applied frequencies, is causedpredominantly by the quadratic contribution to the charge-voltage relation ofthe plasma sheaths. Using PIC/MCC simulations of single- and multi- frequencycapacitive discharges and an equivalent circuit model, we demonstrate thatother mechanisms such as a cubic contribution to the charge-voltage relation ofthe plasma sheaths and the time dependent bulk electron plasma frequency cancause the self-excitation of PSR oscillations, as well. These mechanisms havebeen neglected in previous models, but are important for the theoreticaldescription of the current in symmetric or weakly asymmetric discharges.

On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges