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Ultrafast laser material processing has received significant attention due toa growing need for the fabrication of miniaturized devices at micro- andnanoscales. The traditional phenomenological laws, such as Fourier's law ofheat conduction, are challenged in the microscale regime and a hyperbolic ordual phase lag model should be employed. During ultrafast laser interactionwith metal, the electrons and lattices are not in equilibrium. Varioustwo-temperature models that can be used to describe the nonequilibrium heattransfer are presented. A semi-classical two-step heating model to investigatethermal transport in metals caused by ultrashort laser heating is alsopresented. The main difference between the semiclassical and thephenomenological two-temperature models is that the former includes the effectsof electron drifting, which could result in significantly different electronand lattice temperature response from the latter for higher-intensity andshorter-pulse laser heating. Under higher laser fluence and/or short pulse, thelattice temperature can exceed the melting point and melting takes place. Theliquid phase will be resolidified when the lattice is cooled by conducting heataway. Ultrafast melting and resolidification of the thin gold film andmicroparticles were investigated. At even shorter pulse width, femtosecondlaser heating on metals produces a blasting force from hot electrons in thesub-picosecond domain, which exerts on the metal lattices along with thenon-equilibrium heat flow. Our work that employs the parabolic two-step heatingmodel to study the effect of the hot-electron blast in multi-layered thin metalfilms is also presented.

Micro- and Nanoscale Heat Transfer in Femtosecond Laser Processing of Metals