English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

In the semiconductor manufacturing batch processes, each step is acomplicated physiochemical batch process; generally it is difficult to performmeasurements online or carry out the measurement for each run, and hence therewill be delays in the feedback of the system. The effect of the delay on thestability of the system is an important issue which needs to be understood.Based on the exponentially weighted moving average (EWMA) algorithm, we proposetwo kinds of controllers, EWMA-I and II controllers for single product processand mixed product process in semiconductor manufacturing in this paper. For thesingle product process, the stabilities of systems with both controllers whichundergo different kinds of metrology delays are investigated. Necessary andsufficient conditions for the stochastic stability are established.Routh-Hurwitz criterion and Lyapunov's direct method are used to obtain thestability regions for the system with fixed metrology delay. By usingLyapunov's direct method, the stability region is established for the systemwith fixed sampling metrology and with stochastic metrology delay. We alsoextended the theorems of single product process to mixed product process. Basedon the proposed theorems, some numerical examples are provided to illustratethe stability of the delay system.

Stability analysis of semiconductor manufacturing process with EWMA run-to-run controllers