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We introduce a new Monte Carlo model based on a semi-empirical sputter yieldparameter in ion-solid energetic collisions. This model circumvents thecomplexity of the existing statistical, classical and continuum models, most ofwhich are difficult to relate to real experimental parameters, by itssemi-empirical nature of direct reliance on the experimental values of thesputter yield. Constrained by this crucial experimental factor, the model thenaddresses the multidimensional nature of other accompanying physical processesstochastically; thus reducing the complexity of their computation. This modelexhibits the experimentally observed features of solid surfaces that evolveunder continuous particle irradiation and allows for a way to study the effectof the different mechanisms of the surface morphology and the nature of theirinterplay in the dynamics of the surface evolution. Our study of the averagesurface height reveals that it is constant when eroded particles areredeposited but varies linearly with simulation time, when eroded particles arenot redeposited. Our studies also show that the roughening process is notsignificantly affected by re-deposition of eroded material.

A quasi-conserved particle Monte Carlo model of surface evolution with semi-empirical sputter yield modulated erosion: 1 keV Ar$^+$ sputtering of Si