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Nanotechnology research requires the routine use of characterization methodswith high spatial resolution. These experiments are rather costly, not onlyfrom the point of view of the expensive microscopes, but also considering theneed of a rather specialized equipment operator. Here, we describe theconstruction of an inexpensive and simple device that allows the analysis ofnanoparticle in a FEG-SEM; images can be generated at high magnifications (ex.x500.000) and with nanometric resolution. It is based on the acquisition oftransmitted electrons annular dark field (TE-ADF) signal; the systems can carryup to 16 TEM samples and, it is compatible with SEM sample exchange air-lock.Performance test have shown the measured ADF signal showed the atomic numberand thickness dependence for transition metal nanoparticle about 10 nm indiameter. Also, the signal quality is high enough that the determination of thehistogram of size distribution can be performed using a conventional imageprocessing software, for gold particles in the range of 2-10 nm in diameter.The developed ADF device allows a much faster and cheaper high spatialresolution imaging of nanoparticle samples for routine morphologicalcharacterization and, provides an invaluable high throughput tool for anefficient sample screening.

High-throughput nanoparticle analysis in a FEG-SEM using an inexpensive multi-sample STEM-ADF system