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Many of the envisioned quantum photonic technologies, e.g. a quantumrepeater, rely on an energy- (wavelength-) tunable source of polarizationentangled photon pairs. The energy tunability is a fundamental requirement toperform two-photon-interference between different sources and to swap theentanglement. Parametric-down-conversion and four-wave-mixing sources ofentangled photons have shown energy tunability, however the probabilisticnature of the sources limits their applications in complex quantum protocols.Here we report a silicon-based hybrid photonic chip where energy-tunablepolarization entangled photons are generated by deterministic and scalableIII-V quantum light sources. This device is based on a micro-electromechanicalsystem (MEMS) incorporating InAs/GaAs quantum dots (QDs) on a PMNPT-on-siliconsubstrate. The entangled photon emissions from single QDs can be tuned by morethan 3000 times of the radiative linewidth without spoiling the entanglement.With a footprint of several hundred microns, our design facilitates theminiaturization and scalable integration of indistinguishable entangled photonsources on silicon. When interfaced with silicon-based quantum photoniccircuits, this device will offer a vast range of exciting possibilities.

Energy-tunable entangled photon sources on a III-V/Silicon chip