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The properties of artificially grown thin films are often strongly affectedby the dynamic relationship between surface growth processes and subsurfacestructure. Coherent mixing of X-ray signals promises to provide an approach tobetter understand such processes. Here, we demonstrate the continuouslyvariable mixing of surface and bulk scattering signals during real-time studiesof sputter deposition of a-Si and a-WiS2 films by controlling the X-raypenetration and escape depths in coherent grazing incidence small angle X-rayscattering (Co-GISAXS). Under conditions where the X-ray signal comes from boththe growth surface and the thin film bulk, oscillations in temporalcorrelations arise from coherent interference between scattering fromstationary bulk features and from the advancing surface. We also observeevidence that elongated bulk features propagate upward at the same velocity asthe surface. Additionally, a highly surface sensitive mode is demonstrated thatcan access the surface dynamics independently of the subsurface structure.

Using coherent X-rays to directly measure the propagation velocity of defects during thin film deposition