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We present the development status of the SOIKID, a detector combining the SOIpixel detector and the superconducting detector KID (Kinetic InductanceDetector). The aim of the SOIKID is to measure X-ray photon energy with theresolution better than that of the semiconductor detector. The siliconsubstrate is used as the X-ray photon absorber. The recoiled electron createsathermal phonons as well as the ionizing electron-hole pairs. The KID formed atone side of the substrate surface detects the phonons to measure the totalenergy deposited, while the SOI pixel detector formed on the other side of thesubstrate detects the ionized carries to measure the position. Combining theposition and energy measurements, it is in principle possible to have theextremely high energy resolution.

SOIKID, SOI pixel detector combined with superconducting detector KID