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Unwanted motion of the probe with respect to the sample is a ubiquitousproblem in scanning probe microscopy, causing both linear and nonlinearartifacts in experimental images. We have designed a procedure to correct theseartifacts by using orthogonal scan pairs to align each measurement line-by-linealong the slow scan direction. We demonstrate the accuracy of our algorithm onboth synthetic and experimental data and provide an implementation of ourmethod.

Correcting nonlinear drift distortion of scanning probe microscopy from image pairs with orthogonal scan directions