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An ongoing challenge in atomic force microscope (AFM) experiments is thequantitative measurement of cantilever motion. The vast majority of AFMs usethe optical beam deflection (OBD) method to infer the deflection of thecantilever. The OBD method is easy to implement, has impressive noiseperformance and tends to be mechanically robust. However, it represents anindirect measurement of the cantilever displacement, since it is fundamentallyan angular rather than a displacement measurement. Here, we demonstrate ametrological AFM that combines an OBD sensor with a laser Doppler vibrometer(LDV) to enable accurate measurements of the cantilever velocity anddisplacement. The OBD/LDV AFM allows a host of quantitative measurements to beperformed, including in-situ measurements of cantilever oscillation modes inpiezoresponse force microscopy (PFM). As an example application, we demonstratehow this instrument can be used for accurate quantification of piezoelectricsensitivity, a longstanding goal in the electromechanical community.

Quantitative Measurements of Electromechanical Response with a Metrological Atomic Force Microscope