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We simulated the growth of 2D islands with 2 kinds of diffusion atoms usingthe kinetic Monte- Carlo (kMC) method. As a result, we found that the slowatoms tend to create nuclei and determine the island volume distribution, alongwith additional properties such as island density. We also conducted atheoretical analysis using the rate equation of the point-island model toconfirm these results.

Size distribution of islands according to 2D growth model with 2 kinds of diffusion atoms