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We have investigated recrystallization of amorphous Yttrium Iron Garnet (YIG)by annealing in oxygen atmosphere. Our findings show that well below themelting temperature the material transforms into a fully epitaxial layer withexceptional quality, both structural and magnetic.\\ In ferromagnetic resonance(FMR) ultra low damping and extremely narrow linewidth can be observed. For a56 nm thick layer a damping constant of$\alpha$=(6.63$\pm$1.50)$\cdot$10$^{-5}$ is found and the linewidth at 9.6 GHzis as small as 1.30$\pm$0.05 Oe which are the lowest values for PLD grown thinfilms reported so far. Even for a 20 nm thick layer a damping constant of$\alpha$=(7.51$\pm$1.40)$\cdot$10$^{-5}$ is found which is the lowest value forultrathin films published so far. The FMR linewidth in this case is3.49$\pm$0.10 Oe at 9.6 GHz. Our results not only present a method ofdepositing thin film YIG of unprecedented quality but also open up new optionsfor the fabrication of thin film complex oxides or even other crystallinematerials.

High Quality Yttrium Iron Garnet Grown by Room Temperature Pulsed Laser Deposition and Subsequent Annealing