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We report the structural and optical properties of molecular beam epitaxy(MBE) grown 2-dimensional (2D) material molybdenum diselenide (MoSe2) ongraphite, CaF2 and epitaxial graphene. Extensive characterizations reveal that2H- MoSe2 grows by van-der-Waals epitaxy on all 3 substrates with a preferredcrystallographic orientation and a Mo:Se ratio of 1:2. Photoluminescence atroom temperature (~1.56 eV) is observed in monolayer MoSe2 on both CaF2 andepitaxial graphene. The band edge absorption is very sharp, <60 meV over 3decades. Overcoming the observed small grains by promoting mobility of Mo atomswould make MBE a powerful technique to achieve high quality 2D materials andheterostructures.

Molecular beam epitaxial growth of MoSe2 on graphite, CaF2 and graphene