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We test the reproducibility of X-ray reflectometry(XRR) measurements andoptimizations using an National Metrology Institute of Japan (NMIJ)/NationalInstitute of Advanced Industrial Science and Technology (AIST) pre-standard.Based on bootstrap analysis of repeated refinements, using several CPU-years oftime, we provide concrete recommendations of best practices for ensuring thereproducibility of XRR model fitting results. These recommendations can be usedto study both instrument repeatability and cross-instrument reproducibility.Because the recommendations used optimizations methods available in commonlyused commercial software, they can quickly be applied both in research andanalytical laboratories, as well as fabrication environments.

Reproducible x-ray reflectometry optimization: statistical analysis of differential evolution fitting of multilayer structural models