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We investigate thin films of conducting aluminium-oxide, also known asgranular aluminium, as a material for superconducting high quality, highkinetic inductance circuits. The films are deposited by an optimised reactiveDC magnetron sputter process and characterised using microwave measurementtechniques at milli-Kelvin temperatures. We show that, by precise control ofthe reactive sputter conditions, a high room temperature sheet resistance andtherefore high kinetic inductance at low temperatures can be obtained. For acoplanar waveguide resonator with 1.5\,k$\Omega$ sheet resistance and a kineticinductance fraction close to unity, we measure a quality factor in the order of700\,000 at 20\,mK. Furthermore, we observe a sheet resistance reduction bygentle heat treatment in air. This behaviour is exploited to study the kineticinductance change using the microwave response of a coplanar wave guideresonator. We find the correlation between the kinetic inductance and the sheetresistance to be in good agreement with theoretical expectations.

Aluminium-oxide wires for superconducting high kinetic inductance circuits