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The eigenvalues of a new microbeam-rigid-body gyroscope are computed andstudied to show the variation of frequencies versus the input spin rate. Tothis end, assuming the harmonic solution of the dynamic equation of motion thecharacteristic equation is obtained and solved for the natural frequencies ofthe system in the rotating frame. It is shown that the difference between thenatural frequencies (eigenvalues) proportionally grows with the input angulardisplacement rate.

Eigenvalue analysis of a cantilever beam-rigid-body MEMS gyroscope