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Using industrial standard 0.35{\mu}m CMOS Integrated Circuit process, werealized a highly pixelated sensor that directly collects charge via metalnodes placed on the top of each pixel and forms two dimensional images ofcharge cloud distribution. The first version, Topmetal-I, features a 64x64pixel array of 80{\mu}m pitch size. Direct charge calibration reveals anaverage capacitance of 210fF per pixel. The charge collection noise is near thethermal noise limit. With the readout, individual pixel channels exhibit a mostprobable equivalent noise charge of 330e-.

Development of a highly pixelated direct charge sensor, Topmetal-I, for ionizing radiation imaging