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This paper illustrates the design, fabrication and experiment results ofsurface preparation system for 500MHz superconducting cavity at ShanghaiInstitute of Applied Physic (SINAP). The SINAP established a set of clean room,buffered chemical polishing equipment, and high pressure ultra-pure waterrinsing facility. The whole surface preparation procedure has been operatedsuccessfully and verified by the successful vertical tests of 500MHz singlecell superconducting cavity.

SINAP surface preparation processing for 500MHz superconducting cavity