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We report on fabrication of a microtoroid resonator of a high-quality factor(i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition)using femtosecond laser three-dimensional (3D) micromachining. Coupling oflight into and out of the microresonator has been realized with a fiber taperthat is reliably assembled with the microtoroid. The assembly of the fibertaper to the microtoroid is achieved by welding the fiber taper onto thesidewall of the microtoroid using CO2 laser irradiation. The integratedmicroresonator maintains a high Q-factor of 3.21x10^5 as measured in air.

Integration of an optical fiber taper with an optical microresonator fabricated in glass by femtosecond laser 3D micromachining