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The ion-bombardment induced nanopatterning of Si(001) has been simulated byatomistic simulations with and without Fe impurity. The surface contaminationhas been simulated by using a new force field developed for FeSi. This is afitted bond order potential (BOP) given for Si and for Fe by Albe et al. ThisBOP formula has been optimized simultaneously for FeSi, Si and for Fe. Usingthis new force field we are able to follow the ion-beam assisted deposition forSi in the presence of Fe contamination in the surface region. As an overallresult, we get an unexpectedly rich variety of nanopatterns formed by thereorganization of the crater rims of the individual ion impacts. The previouslythought simple atomistically roughened surfaces show unprecedented landscapesand topography with nanoscale features. The characteristic size of the units ofthe pattern is in the range of a few nms. Typical of the occurred pattern isthe network of interconnected elongated adatom islands. We also see theself-organization of this pattern upon ion-bombardments. At $50^{\circ}$ impactangle we get a nanoporous surface (sponge-like) both for Fe-contaminated andFe-free simulations. At $70^{\circ}$ of impact (grazing angle of incidence) thepattern resembles to that of elongated atomic chains (adatom islands) along theion impact direction. This latter pattern could be understood as a prepatternstate towards rippling. At lower angles ($30^{\circ}$) nanoholes rule thelandsdcape. The obtained pattern corresponds to low fluence experiments whichare used to consider as simple roughening without showing any sing ofpatterning.

Fe impurity induced ion-nanopatterning: atomistic simulations using a new force field for FeSi