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Quantification of sputter depth profiles is frequently done by fitting theconvolution integral over concentration and depth resolution function. For athin delta layer, there exist analytical solutions. The analytical depthresolution functions of two popular approaches, that of the MRI model and thatof Dowsett and coworkers are compared. It is concluded that the analyticaldepth resolution function of the MRI model gives the correct location of aburied delta layer with respect to the measured profile, and a cleardescription of the information depth in AES, XPS and SIMS. Both analyticalsolutions can be extended to larger layer thickness. But they are less flexiblewith respect to physical parameters which are not constant with concentrationor sputtered depth, such as detection sensitivity, atomic mixing, roughness orpreferential sputtering. For these cases, numerical solutions have to be used.

Comparison of Analytical and Numerical Resolution Functions in Sputter Depth Profiling