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Scanning thermal microscopy (SThM) - a type of scanning probe microscopy thatallows mapping thermal transport and temperatures in nanoscale devices, isbecoming a key approach that may help to resolve heat dissipation problems inmodern processors and develop new thermoelectric materials. Unfortunately,performance of current SThM implementations in measurement of high thermalconductivity materials continues to me limited. The reason for theselimitations is two-fold - first, SThM measurements of high thermal conductivitymaterials need adequate high thermal conductivity of the probe apex, andsecondly, the quality of thermal contact between the probe and the samplebecomes strongly affected by the nanoscale surface corrugations of the studiedsample. In this paper we develop analytical models of the SThM approach thatcan tackle these complex problems - by exploring high thermal conductivitynanowires as a tip apex, and exploring contact resistance between the SThMprobe and studied surface, the latter becoming particularly important when bothtip and surface have high thermal conductivities. We develop analytical modelsupported by the finite element analysis simulations and by the experimentaltests of SThM prototype using carbon nanotube (CNT) at the tip apex as a heatconducting nanowire. These results elucidate vital relationships between theperformance of the probe in SThM from one side and thermal conductivity,geometry of the probe and its components from the other, providing pathway forovercoming current limitations of SThM.

Nanoscale resolution scanning thermal microscopy with thermally conductive nanowire probes