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We created dense ensembles of negatively charged nitrogen-vacancy (NV-)centers in diamond by neutron and electron irradiation for applications inhybrid quantum systems and magnetometry. We characterize fluorescenceintensity, optical and coherence properties of the resulting defects byconfocal microscopy, UV/Vis and FTIR spectroscopy, optically detected magneticresonance and small angle X-ray scattering. We find the highest densities ofNV- at neutron fluences on the order of 10^17 cm^-2 and electron doses of 10^18cm^-2, with spin resonance linewidths of 6 MHz. Lower electron energiesincrease the ratio of centers in the desired negative charge state to those inthe neutral one. Annealing at 900 {\deg}C during the irradiation reduces thespin resonance linewidth. Electron irradiation furthermore results insubstantially higher optical transparency compared to neutron irradiation.

Creation of ensembles of nitrogen-vacancy centers in diamond by neutron and electron irradiation