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In this study we investigate the functional behavior of the intensity inhigh-angle annular dark field (HAADF) scanning transmission electron micrograph(STEM) images. The model material is a silica particle (20 nm) gel at 5 wt%. Byassuming that the intensity response is monotonically increasing withincreasing mass thickness of silica, an estimate of the functional form iscalculated using a maximum likelihood approach. We conclude that a linearfunctional form of the intensity provides a fair estimate but that a powerfunction is significantly better for estimating the amount of silica in thez-direction. The work adds to the development of quantifying materialproperties from electron micrographs, especially in the field of tomographymethods and three-dimensional quantitative structural characterization from aSTEM micrograph. It also provides means for direct three-dimensionalquantitative structural characterization from a STEM micrograph.

Estimation of mass thickness response of embedded aggregated silica  nanospheres from high angle annular dark-field scanning transmission electron  micrographs