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A beam experiment is presented to study heterogeneous reactions relevant toplasma-surface interactions. Atom and ion beams are focused onto the sample toexpose it to quantified beams of oxygen, nitrogen, hydrogen, noble gas ions andmetal vapor. The heterogeneous surface processes are monitored in-situ and inreal time by means of a quartz crystal microbalance (QCM) and Fourier transforminfrared spectroscopy (FTIR). Two examples illustrate the capabilities of theparticle beam setup: oxidation and nitriding of aluminum as a model of targetpoisoning during reactive magnetron sputtering, and plasma treatment ofpolymers (PET, PP).

Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment