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Spatial resolution is a significant factor in the GEM performance in view ofX-rays radiography and UV, visible light imaging. Monte-Carlo method is used toinvestigate the spatial resolution determined by the transverse diffusion inthe device. The simulation results indicate that the electrical parameters,such as the GEM voltages and the electric field at the drift and inductionregions, only have minor effects on the spatial resolution. The geometricalparameters and the working gases chosen, on the other hand, are the mainparameters that determine the spatial resolution. The spatial resolution isdetermined more on the drift and diffusion processes than on the avalancheprocess. Especially for the different working gases, the square root functionof the ratio of the electron diffusion coefficient and the mobility has asignificant effect on the spatial resolution.

Study of spatial resolution in a single GEM simulated by Monte-Carlo method