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We experimentally demonstrate the principle of an on-chip submillimeter wavefilter bank spectrometer, using superconducting microresonators as narrowband-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstripline resonators, which have a resonance frequency in the range of 614-685GHz---two orders of magnitude higher in frequency than what is currentlystudied for use in circuit quantum electrodynamics and photodetectors. Thefrequency resolution of the filters decreases from 350 to 140 with increasingfrequency, most likely limited by dissipation of the resonators.

On-chip filter bank spectroscopy at 600-700 GHz using NbTiN superconducting resonators