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In this paper we used Raman spectroscopy to investigate the opticalproperties of vanadium dioxide (VO2) thin films during the thermally inducedinsulating to metallic phase transition. We observed a significant differencein transition temperature in similar VO2 films grown on quartz and sapphiresubstrates: the film grown on quartz displayed the phase transition at a lowertemperature (Tc=50C) compared a film grown on sapphire (Tc=68C). We alsoinvestigated differences in the detected Raman signal for different wavelengthsand polarizations of the excitation laser. We found that for either substrate,a longer wavelength (in our case 785 nm) yielded the clearest VO2 Ramanspectra, with no polarization dependence.

Substrate Effect on Optical Properties of Insulator-Metal Transition in VO2 Thin Films