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The structural, optical and electrical properties of spray deposited antimony(Sb) doped tin oxide (SnO2) thin films, prepared from SnCl4 precursor, havebeen studied as a function of antimony doping concentration. The dopingconcentration was varied from 0 to 1.5 wt.% of Sb. The analysis of x-raydiffraction patterns revealed that the as deposited doped and undoped tin oxidethin films are pure crystalline tetragonal rutile phase of tin oxide whichbelongs to the space group P42/mnm (number 136). The surface morphologicalexamination with field emission scanning electron microscopy (FESEM) revealedthe fact that the grains are closely packed and pores/voids between the grainsare very few. The transmittance spectra for as-deposited films were recorded inthe wavelength range of 200 to 1000 nm. The transmittance of the films wasobserved to increase from 57% to 68% (at 800 nm) on initial addition of Sb (upto [Sb]/[Sn] = 0.5 wt.%) and then it is decreased for higher level of antimonydoping ([Sb]/[Sn] > 0.5 wt.%). The sheet resistance of tin oxide films wasfound to decrease from 48 \Omega/sq for undoped films to 8 \Omega/sq forantimony doped films.

Structural/microstructural, optical and electrical investigations of Sb-SnO2 thin films deposited by spray pyrolysis