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An extremely sensitive temperature measurement MEMS device is developed basedon the principle of structural deflection in a bi-material cantilever caused bya difference in thermal expansion coefficients. A dual-beam asymmetricalgeometry is used to produce a torsional response from the device. An analyticalmodel is developed to predict the performance and optimize the free parametersof the device. In this work, it is performed to analyze the flexural andtorsional eigenfrequencies as well as confirm the theoretical predictions of DCand AC response. Lastly, a procedure is developed to allow fabrication of thedevice using equipment available in the Columbia University clean room.

Analysis of Dual-beam Asymmetrical Torsional Bi-Material Cantilever for Temperature Sensing Applications