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Recent experiments showed that unity-order index change in a transparentconducting oxide (TCO) can be achieved in a metal-oxide-semiconductor (MOS)structure by accumulation charge. However, the ultrathin (~5nm) accumulationlayer and inherent absorption of TCOs impede the practical applications of thiseffect. Herein, we propose and explore a novel waveguide, namely "TCO-slotwaveguide", which combines both the tunable property of a TCO and fieldenhancement of a slot waveguide. In particular, light absorption can be sharplyenhanced when the slot dielectric constant is tuned close to zero. Based onTCO-slot waveguides, efficient electro-absorption modulation can be achievedwithin 200 nm with small insertion loss.

Nanoscale Plasmonic and Optical Modulators Based on Transparent Conducting Oxides