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A new approach, called Adaptive Q-control, for tapping-mode Atomic ForceMicroscopy (AFM) is introduced and implemented on a home-made AFM set-uputilizing a Laser Doppler Vibrometer (LDV) and a piezo-actuated bimorph probe.In the standard Q-control, the effective Q-factor of the scanning probe isadjusted prior to the scanning depending on the application. However, there isa trade-off in setting the effective Q-factor of an AFM probe. The Q-factor iseither increased to reduce the tapping forces or decreased to increase themaximum achievable scan speed. Realizing these two benefits simultaneouslyusing the standard Q-control is not possible. In adaptive Q-control, theQ-factor of the probe is set to an initial value as in standard Q-control, butthen modified on the fly during scanning when necessary to achieve this goal.In this paper, we present the basic theory behind the adaptive Q-control, theelectronics enabling the on-line modification of the probe's effectiveQ-factor, and the results of the experiments comparing three different methods:scanning a) without Q-control, b) with the standard Q-control, and c) with theadaptive Q-control. The results show that the performance of the adaptiveQ-control is superior to the other two methods.

Adaptive Q control for Tapping-mode Nano-scanning Using a Piezo-actuated Bimorph Probe