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This work reports optical functionality contained in, as well as and producedby, thin film coatings. A sol-gel process, formulated with precursor activeingredients of erbium oxide and tetraethylorthosilicate (TEOS), was used forspin-coating thin (~130 nm) erbium-doped (~6 at. %) silica films onsingle-crystal silicon. Annealed films produce infrared emission in the1.5-micron band from erbium ions in the film, as well as greatly enhancing(~100X) band-gap emission from the underlying silicon. The distinctly differentmechanisms for the two modes of optical activities are interpreted in terms ofoptical emission theory and modeling; prospects for opto-electronicapplications are discussed.

Spin-Coated Erbium-Doped Silica Sol-Gel Films on Silicon