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In this paper, experiments on the deposition of silver nanoclusters areanalysed numerically using improved DSMC method. These experiments were made inthe Institute of Thermophysics SB RAS recent years, in the context of thedevelopment of bactericidal nanocomposite coatings deposition technology. Inthis paper we analyze the gas-dynamic effects in experimental conditions: theparameters of the gas stream from the silver vapor source, the flow of silvervapors inside the source and in the outflowing jet under different conditions,the movement of silver nanoclusters of different masses (up to 1024 atoms) inbuffer gas, expecting different places of nanocluster formation in a source.The simulations revealed a strong nonisothermal state of the source, which waslater confirmed experimentally, the site of nanocluster nulceus formation in asource (subcooled confuser of the nozzle) and, finally, show that the processof nucleation of nanoclusters inside a source is of heterogeneous nature. Thewidth of the silver nanocluster jet (of mass 1024 atoms) reaching targetaccording to sumulations, is in good agreement with that obtained in theexperiment coating profile on the target substrate in a form of narrow stripmade of stainless steel, that further validates the numerical simulations.

Numerical study of gas dynamic processes in conditions of silver nanocluster deposition experiments