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The wafer scale integration of carbon nanotubes (CNT) remains a challenge forelectronic and electromechanical applications. We propose a novel CNTintegration process relying on the combination of controlled capillary assemblyand buried electrode dielectrophoresis (DEP). This process enables to monitorthe precise spatial localization of a high density of CNTs and their alignmentin a pre-defined direction. Large arrays of independent and low resistivity(4.4 x 10^-5 {\Omega}.m) interconnections were achieved using this hybridassembly with double-walled carbon nanotubes (DWNT). Finally, arrays ofsuspended individual CNT carpets have been realized and we demonstrate theirpotential use as functional nano-electromechanical systems (NEMS) by monitoringtheir resonance frequencies (ranging between 1.7 MHz to 10.5MHz) using aFabry-Perot interferometer.

A combination of capillary assembly and dielectrophoresis for wafer scale integration of carbon nanotubes-based electrical and mechanical devices