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The driving engine of the Free Electron Laser in Hamburg (FLASH) is an L-bandsuperconducting accelerator. It is designed to operate in burst mode with 800microsecond pulse duration at a repetition rate of 10 Hz. The maximumaccelerated beam current during the macropulse is 9 mA. Our analysis shows thatthe FLASH technology has great potential since it is possible to construct aFLASH like free electron laser operating at the wavelength of 13.5 and 6.8nanometer with an average power up to 2.6 kW. Such a source meets the physicalrequirements for the light source for the next generation lithography.

Potential of the FLASH FEL technology for the construction of a kW-scale light source for the next generation lithography