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We assume that the sample height measured using AFM is reduced due to contactdeformation. The Herz contact theory is applied for the quantitativedescription. General numerical solution is found. Analytical approximations forspecific contact geometry are derived for the case of cylindrical sample. It isfound that theoretical description are consistent with experimental data. Thedeveloped approach has allowed to determine elastic parameters of individualmicroobjects adsorbed on a surface of solid substrate.

Quantitative methods for deconvolution of true topographical properties of object on the basis of AFM-images: Part 1. Contact tip-sample deformations