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A detailed interface study was conducted on a Fe/MgO/Fe system using laserassisted 3D atom probe. It exhibits an additional oxide formation at the secondinterface of the multilayer structure independent of laser wavelength, laserfluence and the thickness of the tunnel barrier. We have shown with the help ofsimulation that this phenomena is caused by the field evaporation of two layershaving two different evaporation

Interface study of FeMgOFe magnetic tunnel junctions using 3D Atom Probe